A novel monolithic array of multiple metal oxide sensors for E-Nose applications via selective on-chip annealing of nanolayered ALD stacks

Tanneeru A., PATLAR AKBULUT F., Lee B., Misra V.

18th IEEE Sensors Conference, Montreal, Canada, 27 - 30 October 2019 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/sensors43011.2019.8956877
  • City: Montreal
  • Country: Canada
  • Istanbul Kültür University Affiliated: Yes

Abstract

We propose a novel approach towards building a low-power multi-material gas sensor array for E-nose applications via selective on-chip annealing of atomic layer deposited (ALD) multilayer metal oxide stacks. Thin heater membranes, arranged into crossbar arrays, can be used for selective on-chip annealing to convert ALD multilayer stacks into a variety of sensing surfaces that can empower E-nose machine learning for detection of variety of gases with desired specificity. This paper demonstrates the feasibility of this novel approach and utilizes pattern recognition algorithms to show a pathway to adapt this sensor platform for integration with CMOS/MEMS technologies.